A.13.56MHzB.27.12MHzC.40.68MHzD.36.68MHz
A.直流電弧光源B.交流電弧光源C.火花光源D.ICP光源E.空心陰極燈
A.載氣預(yù)凈化系統(tǒng)B.脈沖電極爐C.轉(zhuǎn)化分離系統(tǒng)D.熱導(dǎo)檢測系統(tǒng)E.數(shù)據(jù)處理系統(tǒng)